Method for cleaning sharp tip under ultra-high vacuum
摘要
The present invention relates to a method for cleaning a metal tip used as a probe for a scanning probe microscope or a source for a particle beam under ultra-high vacuum. Provided is the method for cleaning the metal tip which includes the steps of: a) maintaining vacuum with a pressure of 10^-7 mbar in a chamber including the metal tip; b) introducing nitrogen gas into the chamber; and c) applying a positive voltage to the metal tip in the chamber to which the nitrogen gas is introduced.
申请公布号
KR101448199(B1)
申请公布日期
2014.10.08
申请号
KR20130090248
申请日期
2013.07.30
申请人
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
发明人
PARK, IN YONG;AHN, SANG JUNG;CHO, BOK LAE;HAN, CHEOL SU;PARK, CHANG JOON;KIM, JU HWANG;HEO, IN HYE