发明名称 |
INFRARED DETECTOR MADE UP OF SUSPENDED BOLOMETRIC MICRO-PLATES |
摘要 |
An array bolometric detector for detecting an electromagnetic radiation in a predetermined infrared or terahertz wavelength range, including a substrate, and an array of bolometric microplates for the detection of the radiation, suspended above the substrate by support elements. The detector includes a membrane arranged above each microplate, and having patterns having a refractive index smaller than that of the membrane formed therein. The patterns are placed periodically along at least one axis of the membrane, according to a period shorter than or equal to λ n , where λ is a wavelength to be detected and n is the average refractive index of the medium separating the microplate from the membrane. The width of the patterns along the axis increases from a central location of the membrane towards the periphery thereof. |
申请公布号 |
EP2786105(A1) |
申请公布日期 |
2014.10.08 |
申请号 |
EP20120806558 |
申请日期 |
2012.11.23 |
申请人 |
COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES |
发明人 |
BOUTAMI, SALIM;DUMONT, GEOFFROY;HAZART, JÉRÔME;YON, JEAN-JACQUES |
分类号 |
G01J5/02;G01J5/08;G01J5/20;G02B5/18 |
主分类号 |
G01J5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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