Flexible impedance matching for a microwave generator supplied with pulse current

摘要

A method for operating an arrangement of equipment that include a pulse generator for generating electrical pulses, a microwave generator with a break-through voltage, and a transmission element is provided. For transmission of the pulses, the pulse generator is connected to the microwave generator via the transmission element, which in the arrangement of equipment, acts as an impedance varying over time. The voltage characteristic over time or the current characteristic over time of each pulse is defined such that in an operating mode, the impedance of the transmission element is matched to the impedance of the microwave generator when the break-through voltage is reached.

主权项

1. A method for operating an arrangement of equipment that comprises a pulse generator for generating electrical pulses, a microwave generator with a break-through voltage, and a transmission element, wherein the pulse generator is connected to the microwave generator for transmission of the electrical pulses via the transmission element, the transmission element acting in the arrangement of equipment as an impedance varying over time, the method comprising:
setting each of the electrical pulses with a voltage characteristic that changes over time or a current intensity characteristic that changes over time such that the impedance of the transmission element is matched in operating mode to an impedance of the microwave generator when the break-through voltage is reached.