Method of fabricating liquid crystal display device

摘要

A method of fabricating a liquid crystal display device includes the steps of forming a gate electrode and a gate line on a first substrate, forming a gate insulating layer on the gate electrode, forming an active layer on the gate insulating layer and an ohmic contact layer on the active layer, forming source and drain electrodes spaced apart from each other and on the ohmic contact layer, forming a data line that crosses the gate line, etching a portion of the ohmic contact layer between the source and drain electrodes in a chamber of a dry-etching device to expose a portion of the active layer, forming a passivation layer on the first substrate which remains in the chamber, the passivation layer covering the portion of the active layer, forming a pixel electrode connected to the drain electrode, and interposing a liquid crystal layer between the pixel electrode and a second substrate.

主权项

1. A method of fabricating a liquid crystal display device, comprising the steps of:
forming a gate electrode and a gate line on a first substrate; forming a gate insulating layer on the gate electrode; forming an active layer on the gate insulating layer and an ohmic contact layer on the active layer; forming source and drain electrodes spaced apart from each other and on the ohmic contact layer; forming a data line that crosses the gate line; etching a portion of the ohmic contact layer between the source and drain electrodes in a chamber of a dry-etching device to expose a portion of the active layer; forming a passivation layer on the first substrate which remains in the chamber, the passivation layer covering the portion of the active layer; forming a pixel electrode connected to the drain electrode; and interposing a liquid crystal layer between the pixel electrode and a second substrate, wherein the passivation layer does not overlap the source and drain electrodes, and wherein a portion of the passivation layer directly below the pixel electrode does not overlap the drain electrode.