| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a chip exfoliation device which is capable of stably exfoliating a chip without damaging the chip, further, for which operation in exfoliation work is simplified and high-accuracy control is not required, either, and which can be provided at a low cost as a device, and a chip exfoliation method.SOLUTION: The chip exfoliation device comprises: a stage receiving a seat; a collet adsorbing the chip at a side opposite to the stage; adsorption means for adsorbing the seat being received by the stage closer to the stage; a vertical movement mechanism for the stage which vertically moves the stage; and a pin member receiving the chip to be exfoliated via the seat. The chip to be exfoliated is received by the pin member via the seat being adsorbed by the stage and in the state where the chip to be exfoliated is adsorbed by the collet, the vertical movement mechanism is controlled by control means and the stage is moved down. A vertical movement mechanism for a pin in a pin-driven existing chip exfoliation device is used as the vertical movement mechanism for the stage.</p> |
