X-RAY FLUORESCENCE ANALYZER

摘要

The present invention provides an X-ray fluorescent analyzer which is capable of detecting a foreign matter on a drop prevention plate. An X-ray fluorescence analyzer (1) includes: a sample stage (2) having an opening (2a) at an X-ray irradiation position; an X-ray source (3) which irradiates a sample (S) placed on the opening with a primary X-ray (X1) from below; a detector (4) which detects an X-ray fluorescence (X2) generated from the sample; a transparent drop prevention plate (5) supported to be advanced and retracted immediately below the opening; a drive mechanism (6) which advances and retracts the drop prevention plate, an observation camera (7) which observes the drop prevention plate positioned immediately below the opening; and an operation unit (8) which processes an image of the drop prevention plate which is captured by the observation camera. The operation unit detects a foreign matter (S1) on the drop prevention plate based on an image difference between images before and after the drive mechanism moves or vibrates the drop prevention plate within an observation range of the observation camera.