发明名称 VIBRATION PIECE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a vibration piece having high detection sensitivity.SOLUTION: A vibration piece has a first vibration mode in which adjacent detection vibration arms are bent and vibrated in mutually opposite directions at the opposite phase with respect to adjacent drive vibration arms bending and vibrating in mutually opposite directions toward an out-of-plane direction according to Coriolis force, and a second vibration mode in which the adjacent detection vibration arms are bent and vibrated in the mutually opposite directions at the same phase as the adjacent drive vibration arms bending and vibrating in the mutually opposite directions toward the out-of-plane direction according to Coriolis force. The ratio of crystal impedance CI2 during the second vibration mode to crystal impedance CI1 during the first vibration mode, R=CI2/CI1, is set between a range of 0.15-6.0.
申请公布号 JP2014190949(A) 申请公布日期 2014.10.06
申请号 JP20130069186 申请日期 2013.03.28
申请人 SEIKO EPSON CORP 发明人 NAKAGAWA HIROSHI;NISHIZAWA RYUTA
分类号 G01C19/5628;H01L41/113;H01L41/253 主分类号 G01C19/5628
代理机构 代理人
主权项
地址