发明名称 DETOXIFICATION TREATMENT APPARATUS AND DETOXIFICATION TREATMENT METHOD
摘要 PROBLEM TO BE SOLVED: To provide a detoxification treatment apparatus which decomposes and eliminates a harmful gas component in a processed gas with high efficiency and achieves downsizing, and to provide a detoxification treatment method.SOLUTION: A detoxification treatment apparatus 1 includes: a solution storage tank 2 which stores a solution in which a harmful gas component in a processed gas dissolves; a bubble formation part 3 which introduces bubbles P of the processed gas and the solution into the solution in the solution storage tank with the bubbles P and the solution mixed; an electromagnetic field application part 4 which is provided in the solution in the solution storage tank 2 and makes the bubbles P into plasma; micro wave supply means 5 which supplies micro waves to the electromagnetic field application part 4; and a gas exhaust port 6 which is provided at the upper part side of the solution storage tank 2 and exhausts a gas component, from which a harmful component is eliminated, to the outer side of the solution storage tank 2.
申请公布号 JP2014188498(A) 申请公布日期 2014.10.06
申请号 JP20130069031 申请日期 2013.03.28
申请人 TAIYO NIPPON SANSO CORP 发明人 SUZUKI KATSUMASA
分类号 B01D53/70;B01D53/18;B01D53/77;B01J19/08;H01L21/205;H01L21/3065;H01L21/31;H05H1/24 主分类号 B01D53/70
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