| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a technique for highly accurately measuring the position of a surface to be detected.SOLUTION: A measurement device for the position of a surface to be detected 24 includes a light source 1, a wavelength scanning part 11 periodically scanning the wavelength of light emitted from the light source by periodically changing the amount of a current flowing in the light source 1, a detection part detecting the interference light of reflected light emitted from the light source and reflected by each of a reference surface 25 and the surface to be detected 24, and a processing part 100 processing the detection signal of the interference light, to generate data for indicating the position of the surface to be detected 24. The processing part 100 corrects the detection signal by subtracting the intensity signal of the light emitted from the light source 1, whose intensity is periodically changed according to the periodical change of the amount of the current from the detection signal and generates the data for indicating the position of the surface to be detected 24, based on the corrected detection signal.</p> |
