| 发明名称 |
MICRO PUMP |
| 摘要 |
There is provided a micro pump including a bottom substrate, a channel forming substrate coupled to the bottom substrate and provided with an inlet into which a fluid is introduced and an outlet through which the fluid is discharged, and a valve integrally formed with the channel forming substrate. |
| 申请公布号 |
US2014294629(A1) |
申请公布日期 |
2014.10.02 |
| 申请号 |
US201313913376 |
申请日期 |
2013.06.07 |
| 申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
KIM Sang Jin;KU Bo Sung |
| 分类号 |
F04B19/00;F04B13/00;F04B17/00 |
主分类号 |
F04B19/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A micro pump, comprising:
a bottom substrate; a channel forming substrate coupled to the bottom substrate and provided with an inlet into which a fluid is introduced and an outlet through which the fluid is discharged; and a valve integrally formed with the channel forming substrate. |
| 地址 |
Suwon KR |
