DEVICE, ARRANGEMENT, AND METHOD FOR THE INTERFERENCE STRUCTURING OF PLANAR SAMPLES

摘要

The invention relates to a device (and a corresponding method) for the interference structuring of a planar sample, comprising a laser, a focusing element, which is arranged in the beam path of the laser and by means of which the laser radiation can be focused in a first spatial direction, a first prism, in particular a biprism, which is arranged in the beam path of the laser and by means of which the laser radiation can be directed at a sample volume in a second spatial direction preferably perpendicular to the first spatial direction by means of two beams, in such a way that the two beams interfere within the sample volume in an interference area, the sample volume, in which the planar sample is or can be placed in the interference area, and a moving unit, by means of which the beam(s) of the laser radiation can be moved in the first, the second, or the first and second spatial directions and/or by means of which a/the sample can be moved in the sample volume in the first, the second, or the first and second spatial directions.

主权项

1. An apparatus for the interference structuring of a planar sample, the apparatus comprising:
a laser; a single-part or multipart focusing element that is arranged in a beam path of the laser and with which laser radiation can be focused in a first spatial direction; a first prism, in particular a biprism, which is arranged in the beam path of the laser and with which the laser radiation in a second spatial direction can be directed into one or more beams of laser radiation onto a sample volume such that the one or more beams of laser radiation interfere within the sample volume in an interference region, wherein the planar sample can be positioned or is positioned in the interference region; and a movement unit configured to perform at least one of moving the one or more beams of the laser radiation and moving the planar sample in the sample volume.