| 摘要 |
This invention is for forming reforming regions (7) on a machining target (1) by condensing laser light (L) on the machining target (1), and is provided with a laser light source for emitting laser light (L), a light condensing optical system (4) for condensing the laser light (L) emitted by the laser light source on the machining target (1), and an aberration creating unit (203) for creating an aberration in the laser light (L) condensed on the machining target (1) by the light condensing optical system (4). When the range of condensation-inducing aberration in the optical axis direction of the laser light (L) is designated as a standard aberration range, the condensation-inducing aberration being aberration occurring in the condensation position as a result of condensing the laser light (L) on the machining target (1), the aberration creating unit (203) creates a first aberration in the laser light so as to have a long range that is longer than the standard aberration range in the optical axis direction as a range of aberration, and also to have a level of intensity such that the intensity distribution of laser light (L) in the optical axis direction is continuous in the long range; whereby machining quality is improved. |
