| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical filter device, an optical module and electronic equipment capable of suppressing degradation in optical characteristics.SOLUTION: The optical filter device includes: a wavelength variable interference filter having a movable substrate on which electrode pads (electrode pads 563P, 564P, 551P, 541P) are disposed; a base substrate which opposes to the movable substrate and mounts the wavelength variable interference filter; and a fixing member 7 which is disposed between the movable substrate and the base substrate and fixes these substrates. The fixing member 7 is disposed, in a plan view of the filter, at a position overlapping the above electrode pads. |
