发明名称 READ HEAD SENSOR WITH A TANTALUM OXIDE REFILL LAYER
摘要 In one embodiment, a method includes masking a sensor stack with a first mask, milling exposed regions of the sensor stack for defining a back edge of the sensor stack, forming a tantalum oxide layer along the back edge, removing the first mask, masking the sensor stack with a second mask, and milling exposed regions of the sensor stack for defining side edges of the sensor stack, a width of the sensor stack in a track width direction being defined between the side edges. In another embodiment a system includes a sensor stack of thin films having a back edge, and a tantalum oxide layer extending along the back edge.
申请公布号 US2014293472(A1) 申请公布日期 2014.10.02
申请号 US201313851028 申请日期 2013.03.26
申请人 HGST NETHERLANDS B.V. 发明人 Balamane Hamid;Katine Jordan A.;Li Jui-Lung;Robertson Neil L.
分类号 G11B5/39;G11B5/84 主分类号 G11B5/39
代理机构 代理人
主权项 1. A method, comprising: masking a sensor stack with a first mask; milling exposed regions of the sensor stack for defining a back edge of the sensor stack; forming a tantalum oxide layer along the back edge; removing the first mask; masking the sensor stack with a second mask; and milling exposed regions of the sensor stack for defining side edges of the sensor stack, a width of the sensor stack in a track width direction being defined between the side edges.
地址 Amsterdam NL