发明名称 METHOD AND SYSTEM FOR CONTROLLING CONVECTIVE FLOW IN A LIGHT-SUSTAINED PLASMA
摘要 A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.
申请公布号 WO2014160981(A1) 申请公布日期 2014.10.02
申请号 WO2014US32260 申请日期 2014.03.28
申请人 KLA-TENCOR CORPORATION 发明人 BEZEL, ILYA;SHCHEMELININ, ANATOLY;DERSTINE, MATTHEW;GROSS, KENNETH P.;SHORTT, DAVID W.;ZHAO, WEI;CHIMMALGI, ANANT;WANG, JINCHENG
分类号 H01J61/02 主分类号 H01J61/02
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