发明名称 |
METHOD AND SYSTEM FOR CONTROLLING CONVECTIVE FLOW IN A LIGHT-SUSTAINED PLASMA |
摘要 |
A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element. |
申请公布号 |
WO2014160981(A1) |
申请公布日期 |
2014.10.02 |
申请号 |
WO2014US32260 |
申请日期 |
2014.03.28 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
BEZEL, ILYA;SHCHEMELININ, ANATOLY;DERSTINE, MATTHEW;GROSS, KENNETH P.;SHORTT, DAVID W.;ZHAO, WEI;CHIMMALGI, ANANT;WANG, JINCHENG |
分类号 |
H01J61/02 |
主分类号 |
H01J61/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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