| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a nozzle cleaning unit and a nozzle cleaning method capable of effectively removing adherence objects adhered on a nozzle.SOLUTION: A nozzle cleaning unit includes a cleaning nozzle part having a first injection hole annularly opening on an inner wall face of a hole into which a nozzle is inserted, a gas supply part supplying gas to the first injection hole, and a decompression part decompressing atmosphere within the hole into which the nozzle is inserted, in a side opposite to a side where the nozzle is inserted across an installation position of the first injection hole.</p> |
