MANUFACTURING APPARATUS OF ELECTRONIC COMPONENT AND MANUFACTURING METHOD THEREOF

摘要

A first alignment mark is given to a substrate, and a second alignment mark is given to a mask. The mask forms an electronic circuit pattern on the substrate. A control unit performs alignment of the mask and the substrate based on the first and second alignment marks. The second alignment mark is formed to surround the first alignment mark. The second alignment mark has a step pattern therein.

主权项

1. A manufacturing apparatus of an electronic component, the apparatus comprising:
a substrate that has a first alignment mark; a mask that is used to print an electronic circuit pattern on the substrate, the mask having a second alignment mark; and a control unit that performs alignment of the mask and the substrate based on the first and second alignment marks, wherein one of the first and second alignment marks surrounds the other of the first and second alignment marks, and an edge of the one of the first and second alignment marks that faces to the other of the first and second alignment marks has a step pattern.