PRINTHEAD WITH NANOTIPS FOR NANOSCALE PRINTING AND MANUFACTURING

摘要

A nanoprinthead including an array of nanotip cantilevers, where each nanotip cantilever includes a nanotip at an end of a cantilever, and a method for forming the nanoprinthead. Each nanotip may be individually addressable through use of an array of piezoelectric actuators. Embodiments for forming a nanoprinthead including an array of nanotip cantilevers can include an etching process from a material such as a silicon wafer, or the formation of a metal or dielectric nanotip cantilever over a substrate. The nanoprinthead may operate to provide uses for technologies such as dip-pen nanolithography, nanomachining, and nanoscratching, among others.

主权项

1. A nanoprinthead, comprising:
a plurality of nanotip cantilevers, wherein each nanotip cantilever comprises a nanotip connected to a cantilever; a flexible diaphragm, wherein the plurality of nanotip cantilevers are physically connected to a first side of the flexible diaphragm; and a plurality of piezoelectric elements physically connected to a second side of the flexible diaphragm, and configured to move each nanotip in a direction toward a surface to be contacted by the nanotip upon activation of one of the plurality of piezoelectric elements.