发明名称 |
ANTISTATIC SHEET |
摘要 |
Provided is an antistatic sheet having high work efficiency, which is designed for the purpose of developing, improving and stabilizing antistatic properties during a semiconductor production process and the like. An antistatic sheet which is a laminate obtained by laminating a polymer gel on an antistatically treated base sheet. The polymer gel is a gel wherein at least water in which a polyvinyl alcohol polymer is dissolved and a polyhydric alcohol other than the polyvinyl alcohol polymer are held in a polymer matrix that is obtained by copolymerization crosslinking a polymerizable monomer that has one polymerizable carbon-carbon double bond in each molecule and a crosslinkable monomer that has two or more polymerizable carbon-carbon double bonds in each molecule. This antistatic sheet has a ground resistance of from 1.0 × 105 &OHgr; to 1.0 × 1012 &OHgr; (inclusive), and the surface resistivity of the front surface of the base sheet is from 1.0 × 104 &OHgr;/□ to 1.0 × 1012 &OHgr;/□ (inclusive). |
申请公布号 |
WO2014156943(A1) |
申请公布日期 |
2014.10.02 |
申请号 |
WO2014JP57734 |
申请日期 |
2014.03.20 |
申请人 |
SEKISUI PLASTICS CO.,LTD. |
发明人 |
KATO, KAZUKI;FUJIWARA, YASUHIRO |
分类号 |
H05F1/00;C08K5/053;C08L29/04;C08L33/26;C09J7/02;C09J157/00 |
主分类号 |
H05F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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