| 摘要 |
PROBLEM TO BE SOLVED: To reduce the risk of peeling, and to reduce the occurrence of stains.SOLUTION: A method for manufacturing an optical device uses a first mask including an X-shaped pattern portion and a second mask including a cross-shaped pattern portion, and comprises: a first transparent member wafer metal film forming step of superposing the first mask or the second mask on one transparent member wafer of two transparent member wafers and providing a metal film: a second transparent member wafer metal film forming step, after that, of superposing the mask unused in the first transparent member wafer metal film forming step on the one transparent member wafer and providing a metal film ; a third transparent member wafer metal film forming step of superposing the first mask or the second mask on the other transparent member wafer and providing a metal film: a fourth transparent member wafer metal film forming step, after that, of superposing the mask unused in the third transparent member wafer metal film forming step on the other transparent member wafer and providing a metal film; a jointing step of superposing and jointing the two transparent member wafers; and a dicing step of dicing the jointed two transparent member wafers into individual optical devices. |
