| 摘要 |
PROBLEM TO BE SOLVED: To obtain an evaporation container which holds a molten metal or alloy and is suitable for forming a film by evaporating a metal.SOLUTION: An evaporation container is formed of ceramic containing a tungsten carbide (such as WC and WC) as a main component. The tungsten carbide enables highly efficient evaporation of a metal without being reacted with evaporated gas and without being melted and deformed at an evaporation temperature. The tungsten carbide has a relatively high thermal conductivity of 60-70 (W/m K) to facilitate temperature control. |
