ORGANOPOLYSILOXANE, TEMPORARY ADHESIVE COMPOSITION CONTAINING ORGANOPOLYSILOXANE, AND METHOD OF PRODUCING THINNED WAFER USING THE SAME

摘要

The present invention provides a non-aromatic saturated hydrocarbon group-containing organopolysiloxane containing the following units (I) to (III):
(I) a siloxane unit (T unit) represented by R 1 SiO 3/2 : 40 to 99mol%;
(II) a siloxane unit (D unit) represented by R 2 R 3 SiO 2/2 : 59mol% or less; and
(III) a siloxane unit (M unit) represented by R 4 R 5 R 6 SiO 1/2 : 1 to 30mol%. There can be an organopolysiloxane, which is soluble in a nonpolar organic solvent so that the organopolysiloxane can be peeled in a short time, and which is hardly soluble in a polar organic solvent to be exemplarily used upon coating a photoresist onto a semiconductor side of a joined substrate and removing the photoresist therefrom so that the organopolysiloxane is not peeled from the supporting substrate upon coating a photoresist onto a semiconductor side of a joined substrate and removing the photoresist therefrom.