Micro-ejector and method for manufacturing the same

摘要

There are provided a micro-ejector and a method for manufacturing the same. The micro-ejector according to the present invention includes a passage plate including a barrier rib portion disposed in an upper space in a chamber and a protruding portion disposed in a lower space in the chamber and forming a passage in the same direction as a fluid discharging direction together with the barrier rib portion; and an actuator formed on the upper portion of the passage plate to correspond to the chamber and providing a driving force of discharging the fluid to the nozzle from the chamber.

主权项

1. A micro-ejector, comprising:
an upper substrate including
a groove for a chamber, anda barrier rib portion formed downwardly in a thickness direction within the groove in which the chamber of the upper substrate is formed, the barrier rib portion forming a plurality of passages in the chamber by partitioning an inner space of the chamber; a lower substrate coupled to the upper substrate, the lower substrate including
a protruding portion protruding upwardly from an upper surface of the lower substrate, having an upper surface in contact with a lower surface of the barrier rib portion within the chamber, and forming the passages in a fluid discharging direction together with the barrier rib portion; and at least one actuator disposed on an upper surface of the upper substrate to correspond to the passages and providing a driving force of discharging the fluid from the chamber to a nozzle.