Method and system for using a MEMS structure as a timing source

摘要

A system and method is disclosed that provides a technique for generating an accurate time base for MEMS sensors and actuators which has a vibrating MEMS structure. The accurate clock is generated from the MEMS oscillations and converted to the usable range by means of a frequency translation circuit.

主权项

1. A motion sensor comprising:
a MEMS structure, wherein the MEMS structure oscillates at a resonant frequency and provides a sense signal responsive to a movement of the motion sensor; an electronic circuit coupled to the MEMS structure to provide a drive signal responsive to the oscillation of the MEMS structure at the resonant frequency and to detect the sense signal; a frequency translation circuit for receiving the drive signal, wherein the drive signal is translated to provide a clock signal; anda digital circuit coupled to the frequency translation circuit and the electronic circuit, wherein the clock signal is utilized to drive the digital circuit and the digital circuit provides a digital signal that is related to the movement of the motion sensor.