ONSITE ULTRA HIGH PURITY CHEMICALS OR GAS PURIFICATION

摘要

PROBLEM TO BE SOLVED: To provide a system and method for onsite ultra high purity chemicals or gas purification.SOLUTION: The invention provides an onsite purification plant/system to deliver a high purity and ultra high purity product, such as process chemicals and industrial and specialty gases, to manufacturing processes within an onsite plant turndown ratio from 0% to 100% while preserving a predetermined purity of supplied substances within a predefined specification range. Preserving a liquid/vapor ratio in at least one of purification means/units ensuring that product purity range stays unchanged is achieved by redirecting the product back into the onsite purification plant/system.