| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment apparatus for perfluorides which can avoid use of large amounts of water for pretreatment and waste water treatment, remove the solid content in a gas containing perfluorides and prevent clogging of a filter.SOLUTION: A treatment apparatus 2 for perfluorides includes a pretreatment unit 21 for pretreating an apparatus inlet exhaust gas, heating means, consisting of first heater 221 and a second heater 222, of heating the apparatus inlet exhaust gas and water and hydrolyzing perfluorides with a catalyst to form decomposition gases containing an acidic gas, a heat exchanger 231 which is arranged in the front and later stages of the heating means and exchanges heat between the apparatus inlet exhaust gas and water plus decomposition gases and an acid ingredient removal apparatus 232 which removes acid ingredients by a dry method. The pretreatment unit 21 includes an inlet heater 211 which heats the apparatus inlet exhaust gas to evaporate liquid water contained in the apparatus inlet exhaust gas and filters 212 and 212a for removing the solid content from the apparatus inlet exhaust gas. |
