发明名称 SILICON CARBIDE CHIP, SILICON CARBIDE WAFER, TEST METHOD FOR SILICON CARBIDE CHIP, AND TEST METHOD FOR SILICON CARBIDE WAFER
摘要 PROBLEM TO BE SOLVED: To provide a silicon carbide chip, a silicon carbide wafer, a test method for a silicon carbide chip, and a test method for a silicon carbide wafer, to which a current conduction test can be applied even when a chip has a large area.SOLUTION: A silicon carbide chip 4 includes a product chip region 1 in which a silicon carbide semiconductor element performing an actual action is crated, and a PN diode 3 which is disposed around the product chip region 1 and which is not involved in an actual action of a smaller area than the product chip region 1.
申请公布号 JP2014183136(A) 申请公布日期 2014.09.29
申请号 JP20130055828 申请日期 2013.03.19
申请人 MITSUBISHI ELECTRIC CORP 发明人 YAMAMOTO SHIGEHISA;KONISHI KAZUYA
分类号 H01L29/868;H01L21/336;H01L21/66;H01L27/04;H01L29/78;H01L29/861 主分类号 H01L29/868
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