FLAWED SITE PREDICTOR, IDENTIFICATION MODEL GENERATOR, FLAWED SITE PREDICTION PROGRAM, AND FLAWED SITE PREDICTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a flawed site predictor capable of predicting sites where flaws are bound to be generated; an identification model generator; a flawed site prediction program; and a flawed site prediction method.SOLUTION: An extraction unit 41 extracts feature information expressing the feature of a layout pattern of a wire layer on which a flaw has been generated during a lithographic process and neighboring wire layers neighboring the wire layer on the periphery of the flawed site. A generation unit 42 generates an identification model for identifying a flawed site based on the feature information extracted by the extraction unit 41. A prediction unit 43 predicts, by using the identification model generated by the generation unit 42, a site where a flaw is bound to be generated from the layout pattern of a wire layer targeted for inspection possessed by design data including layout patterns of multiple wire layers.