发明名称 FLAT PANEL TYPE RADIATION DETECTOR AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a flat type panel type radiation detector that suppresses discharge breakdown, and attains an elongated life.SOLUTION: Lead wire 21 for supplying a bias voltage is arranged so as to be led out from an opening part 25a provided at a position of an auxiliary plate 25 facing a lead wire connection part 30 where the lead wire 21 connects to a common electrode 3. Thanks to this arrangement enables a thickness of a hardening synthetic resin layer 23 to be made thinner than that of the lead wire 21, and further, enables suppression of a boundary part A which is generated between a part having the lead connection part 30 covered and a part having an effective pixel area SA covered, and in which the thickness of the hardening synthetic resin layer 23 varies. Therefore, warpage due to a difference in a thermal expansion coefficient between the hardening synthetic resin layer 23 and a semiconductor layer 2, and a stress due to a residual stress of the hardening synthetic resin layer 23 or concentration of the stress can be suppressed. Thus, the stress can be reduced and a creeping discharge generated due to damage by the stress concentration can be suppressed.
申请公布号 JP2014181935(A) 申请公布日期 2014.09.29
申请号 JP20130054970 申请日期 2013.03.18
申请人 SHIMADZU CORP 发明人 SATO KENJI;TSUJI HISAO;KISHIMOTO SAKATOSHI
分类号 G01T1/24;H01L27/14;H01L27/144;H01L27/146;H04N5/32;H04N5/369 主分类号 G01T1/24
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