发明名称 HETEROGENEOUS LAYERED STRUCTURE, METHOD FOR PREPARING THE HETEROGENEOUS LAYERED STRUCTURE, AND ELECTRIC DEVICE INCLUDING THE HETEROGENEOUS LAYERED STRUCTURE
摘要 Disclosed is a heterogeneous layered structure of a hexagonal boron nitride sheet (h-BN) and a graphene sheet, an electric device using the same, and a fabricating method thereof. The heterogeneous layered structure has a high quality interface state having few impurities between the h-BN sheet and the graphene sheet, by successively forming the graphene sheet with a vapor deposition method after a large-area h-BN sheet is grown on a metal substrate with a vapor deposition method. The heterogeneous layered structure of the h-BN and the graphene which has a high quality interface condition and a large area can be used for various electronic devices including a FET.
申请公布号 KR20140114199(A) 申请公布日期 2014.09.26
申请号 KR20130028757 申请日期 2013.03.18
申请人 SAMSUNG ELECTRONICS CO., LTD.;RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY 发明人 LEE, SUNG JOO;SONG, YOUNG JAE;WANG MIN;JANG, SUNG KYU;CHOI, JAE YOUNG
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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