发明名称 |
HETEROGENEOUS LAYERED STRUCTURE, METHOD FOR PREPARING THE HETEROGENEOUS LAYERED STRUCTURE, AND ELECTRIC DEVICE INCLUDING THE HETEROGENEOUS LAYERED STRUCTURE |
摘要 |
Disclosed is a heterogeneous layered structure of a hexagonal boron nitride sheet (h-BN) and a graphene sheet, an electric device using the same, and a fabricating method thereof. The heterogeneous layered structure has a high quality interface state having few impurities between the h-BN sheet and the graphene sheet, by successively forming the graphene sheet with a vapor deposition method after a large-area h-BN sheet is grown on a metal substrate with a vapor deposition method. The heterogeneous layered structure of the h-BN and the graphene which has a high quality interface condition and a large area can be used for various electronic devices including a FET. |
申请公布号 |
KR20140114199(A) |
申请公布日期 |
2014.09.26 |
申请号 |
KR20130028757 |
申请日期 |
2013.03.18 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD.;RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY |
发明人 |
LEE, SUNG JOO;SONG, YOUNG JAE;WANG MIN;JANG, SUNG KYU;CHOI, JAE YOUNG |
分类号 |
H01L29/78;H01L21/336 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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