发明名称 HEATER DEVICE AND HEAT TREATMENT APPARATUS
摘要 Disclosed is a heater device. The heater device includes: a cylindrical insulating member; a heater element which is spirally wound plural times and disposed on an inner circumference side of the insulating member; and a supporting member having one or more first members disposed on inner circumference side of the heater element and extending in an axial direction of the insulating member, and a plurality of second members which extend from the first members to an outside of the insulating member in a radial direction and pass through gaps between turns of the heater element which are adjacent to each other in the axial direction of the insulating member such that end portions of the second members are formed to be embedded in the insulating member, in which the first members have expansion allowance portions which allow thermal expansion in the axial direction.
申请公布号 US2014284317(A1) 申请公布日期 2014.09.25
申请号 US201414219394 申请日期 2014.03.19
申请人 Tokyo Electron Limited 发明人 KOBAYASHI Makoto
分类号 H05B3/06 主分类号 H05B3/06
代理机构 代理人
主权项 1. A heater device comprising: a cylindrical insulating member; a heater element which is spirally wound plural times and disposed on an inner circumference side of the insulating member; and a supporting member having one or more first members disposed on inner circumference side of the heater element and extending in an axial direction of the insulating member, and a plurality of second members which extend from the first members to an outside of the insulating member in a radial direction and pass through gaps between turns of the heater element which are adjacent to each other in the axial direction of the insulating member such that end portions of the second members are formed to be embedded in the insulating member, wherein the first members have expansion allowance portions which allow thermal expansion in the axial direction.
地址 Tokyo JP