| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing apparatus capable of detecting a blade tip state easily without blade cooling water.SOLUTION: A dicing apparatus comprises a blade 22 attached on a rotation axis 48 of a spindle 20. The spindle 20 is fixed on a spindle supporting member 18-4. Imaging means 60 for imaging a surface of the blade is provided in a direction along to the rotation axis of the blade, having an interval between the imaging means and the blade. Lighting means 62 is provided for lighting with adjacent oblique lighting or coaxial optical lighting on a surface of the blade in the imaging means side. Backlight lighting means 64 is also provided for lighting backlight on an opposite face of the blade opposing to the imaging means 60. |
