X-Ray Fluorescence Analyzer

摘要

An X-ray fluorescence analyzer includes a sample stage having an opening at an X-ray irradiation position, an X-ray source which irradiates a sample placed on the opening with a primary X-ray from below, a detector which detects an X-ray fluorescence generated from the sample, a transparent drop prevention plate supported to be advanced and retracted immediately below the opening, a drive mechanism which advances and retracts the drop prevention plate, an observation camera which observes the drop prevention plate positioned immediately below the opening, and an operation unit which processes an image of the drop prevention plate which is captured by the observation camera. The operation unit detects a foreign matter on the drop prevention plate based on an image difference between images before and after the drive mechanism moves or vibrates the drop prevention plate within an observation range of the observation camera.

主权项

1. An X-ray fluorescence analyzer comprising:
a sample stage which has an opening at an X-ray irradiation position and is configured to receive a sample placed on the opening; an X-ray source which is configured to irradiate the sample placed on the opening with a primary X-ray from below; a detector which is disposed below the opening and is configured to detect an X-ray fluorescence generated from the sample irradiated with the primary X-ray; a drop prevention plate which is transparent and supported to be advanced and retracted immediately below the opening; a drive mechanism which is configured to advance and retract the drop prevention plate; an observation camera which is disposed below the opening to observe the drop prevention plate when the drop prevention plate is positioned immediately below the opening; and an operation unit which is configured to process an image of the drop prevention plate which is captured by the observation camera, wherein the operation unit is configured to detect a foreign matter on the drop prevention plate based on an image difference between images before and after the drive mechanism moves or vibrates the drop prevention plate within an observation range of the observation camera.