PARTICLE COUNTER AND IMMERSION SCANNER USED THE SAME

摘要

The present invention discloses a particle counter and an immersion exposing facility including the same. The particle counter includes a housing including an inlet and an outlet moving fluid and a window between the inlet and the outlet; multiple light sources emitting each incident light having different wavelengths to the fluid through the window from the outside of the housing; sensors detecting scattered lights of different wavelengths scattered by particles or bubbles in the fluid from the outside of the housing; and a control part monitoring the intensity of each scattered light of different wavelengths from a detection signal of the sensors and differentiating the particles from the bubbles in the fluid based on the intensity of the scattered lights.