| 摘要 |
PROBLEM TO BE SOLVED: To provide a water vapor amount-measuring device and a water vapor amount-measuring method, in which mounting and replacing of a measuring unit (humidity sensing portion) is easy and a water vapor amount can be inexpensively and easily measured with sufficient accuracy under a high temperature environment and even under an environment where a dirt, an adhesion of a droplet, and dew condensation of water vapor to the measuring unit (humidity sensing portion) may occur.SOLUTION: A water vapor amount-measuring device includes: a columnar humidity sensing portion 1 composed of porous materials; a fixing part 2 for fixing one end 1a in a longitudinal direction of the humidity sensing portion 1 to a wall surface 20 of a processing chamber that defines a space of a measuring object; a supply part 3 for supplying water to the one end 1a of the humidity sensing part 1; and a first sensor (temperature sensor 4) mounted on the another end 1b in the longitudinal direction of the humidity sensing portion 1. In the humidity sensing portion 1, water supplied by the supply part 3 circulates from the one end 1a to the another end 1b. |
