MICROFABRICATION MEMBER CONNECTED BY TORSION FLEXURE HINGE AND ROTATED RELATIVELY

摘要

PROBLEM TO BE SOLVED: To provide a structure that is improved in a microfabrication member connected by a torsion flexure hinge and relatively rotated.SOLUTION: A reference frame 56 is connected to a dynamic plate 58, and a frame 56 is connected to the plate 58 with a folding torsion flexure hinge 96 and not with a torsion bar. Then, the folding torsion flexure hinge 96 supports the plate 58 from the side of the frame 56 and comprises three basic hinge elements 102a, 102b, 102c. The direction of a longitudinal axis 98 of each of the basic hinge elements 102a, 102b, 102c is not perpendicular to a rotational axis 62 of the plate 58. An intermediate part 104 of the folding torsion flexure hinge 96 connects a direct adjacent end 106 of the basic hinge elements 102a, 102b, 102c with each other. The basic hinge element 102b includes a torsion sensor 108 for measuring an angular rotation of the plate 58 centering on the axis 62 to the frame 56.