| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pixel failure-free display device by preventing a situation where shutters of pixels become inoperative.SOLUTION: A pixel includes a shutter drive section having: first springs connected to a shutter plate; first anchor sections, each holding an end of the respective first springs; second springs, each positioned such that at least one end thereof is in the proximity of the respective first springs to have electrostatic force acting therebetween; second anchor sections for holding respective second springs; first wiring for providing a predetermined electrical potential to the first anchor sections; second wiring for providing a predetermined electrical potential to the second anchor sections; and a connection layer provided between the first anchor sections and the first wiring and between the second anchor sections and the second wiring. The connection layer is made of a material which remains conductive even after being oxidized, a conductive material which makes non-rectifying contact with silicon, or a material which reacts with silicon to form a silicide.</p> |
