发明名称 FINFET WITH BACK-GATE
摘要 The present invention relates to a double-gate finFET (1000) comprising: at least two fins (FIN) realizing a single channel; a back-gate (BG) placed between the fins; and a front-gate (FG), placed outside of the fins. Further, the invention relates to a manufacturing process, resulting in the double-gate finFET.
申请公布号 WO2014146976(A1) 申请公布日期 2014.09.25
申请号 WO2014EP55039 申请日期 2014.03.13
申请人 SOITEC 发明人 MAZURE, CARLOS;HOFMANN, FRANZ
分类号 H01L29/66;H01L29/78 主分类号 H01L29/66
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