| 摘要 |
<p>Provided are methods and apparatus to improve upon conventional piezoelectric resonators. Also provided are apparatus and methods to improve upon filters having piezoelectric resonators. In an example, a piezoelectric resonator includes a substrate, and a piezoelectric material disposed on the substrate. A first electrode and a second electrode are disposed on the piezoelectric material. The piezoelectric resonator has a passband, and a portion of the perimeter of the piezoelectric material is anchored to the substrate to suppress an in-band spurious mode of the piezoelectric material. The portion, if unanchored, would exhibit maximum, near-maximum, and/or excessive displacement deflection at resonance. The piezoelectric resonator can be integrated in a semiconductor die. Multiple filters having piezoelectric resonators with respective different passbands can be disposed on the substrate.</p> |
