发明名称 Method for forming package substrate
摘要 A method of making a package substrate includes steps of forming a plurality of trenches on a first surface of a metal plate, placing insulation material in the trenches, removing metal plate material under the second surface of the metal plate, and exposing the insulation material in the trenches from substrate. The resulting substrate body includes a conductive portion made of the metal plate, and an insulation portion made of the insulation material. The bonding layers on the opposite sides of the substrate are conducted by the conductive portion for heat dissipation, and are separated from one another by the insulation portion.
申请公布号 US8841172(B2) 申请公布日期 2014.09.23
申请号 US201213593698 申请日期 2012.08.24
申请人 Viking Tech Corporation 发明人 Wei Shih-Long;Hsiao Shen-Li;Ho Chien-Hung
分类号 H01L21/00;H01L33/64;H01L33/62 主分类号 H01L21/00
代理机构 Shoemaker and Mattare 代理人 Shoemaker and Mattare
主权项 1. A method for forming a package substrate, comprising steps of: providing a metal plate having a first surface and a second surface opposing to the first surface; forming a plurality of trenches on the first surface of the metal plate, wherein the trenches are crossed to each other and arranged alternately for dividing the first surface of the metal plate into a plurality of regions; providing insulation material in the trenches; removing metal plate material under the second surface of the metal plate, and exposing the insulation material in the trenches from the first and second surfaces of the metal plate to form a substrate body having two surfaces opposing to each other, wherein the substrate body includes a conductive portion made of the metal plate, and an insulation portion made of the insulation material; and forming a plurality of bonding layers on the two surfaces of the substrate body, wherein the bonding layers are in contact with the conductive portion and the insulation portion so as to be conducted via the conductive portion for heat dissipation, and separated from one another by the insulation portion.
地址 Hsinchu County TW