LASER PROCESSING APPARATUS

摘要

A laser processing apparatus according to an embodiment of the present invention is capable of performing a laser process feasible for various types of process conditions using a single laser processing apparatus. The present invention includes a laser source for generating a laser beam; a stage for fixating a sample; and a scanning unit for emitting a laser beam onto the sample fixated onto the stage, by receiving a laser beam from the laser source. The scanning unit includes more than two scanners; and an optic pathway adjusting unit in order to deliver the laser beam to all scanners or to at least one of the scanners.