| 摘要 |
PROBLEM TO BE SOLVED: To attenuate eigen frequency changing along with driven positions of a linear motion stage.SOLUTION: A control apparatus for a linear motion stage includes: a first filter 34 for filtering the frequency of a signal received from a linear encoder 12 of a linear motion stage 10; an adder 31 for adding an input signal representing a command position and a negative of an output signal of the first filter; a control 32 for generating a control signal for controlling the linear motion stage based on an output signal of the adder; and a second filter 33 for filtering the frequency of the control signal. Each of the input terminals of the first and second filters has a correction table for storing cut-off frequencies and damping rates measured according to the driven positions of the linear motion stage, so as to determine the cut-off frequencies of the first and second filters and the damping rates according to the driven positions of the linear motion stage. |
