INSPECTION DEVICE AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technology for preferably inspecting a semiconductor device or photo device by using a pump/probe measurement method.SOLUTION: An inspection device 100 is a device for inspecting a solar cell 9 that is a type of a photo device. The inspection device 100 comprises: an irradiation unit 12 which disperses pulse light emitted from a femtosecond laser 121 into measurement pump light LP 13 and measurement probe light LP 11, and irradiates the solar cell 9 with them; a detection unit 13 for detecting an electromagnetic wave LT 1 emitted from the solar cell 9 in response to the irradiation with the measurement probe light LP 11; and a measurement delay unit 14A for relatively delaying time at which the measurement probe light LP 11 reaches the solar cell 9 as compared with that at which the measurement pump light LP 13 does. The irradiation unit 12 comprises a galvano mirror 125 for the measurement probe light LP 11 scanning a wide range R11 wider than an irradiation range (pump light spot SP 13) irradiated with the measurement pump light LP 13, in the solar cell 9.