CLEANING DEVICE OF OPTICAL MIRROR

摘要

PROBLEM TO BE SOLVED: To obtain a dry ice snow cleaning device which reduces the risk that a peeled contamination is reflected by, for example, a shield located near a cleaned surface and the cleaned surface is contaminated again when an optical mirror is cleaned by using a dry ice snow cleaning method.SOLUTION: A jet nozzle part 13 which blows dry ice snow 16 and a cleaner head 14 which suctions the dry ice snow 16 are located close to each other. A peeled contamination 17 is immediately suctioned with the dry ice snow 16 by the cleaner head 14.