SINGLE ELECTRON TRANSISTOR HAVING NANOPARTICLES OF UNIFORM PATTERN ARRANGEMENT AND METHOD OF FABRICATING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a single electron transistor and a method of fabricating the same.SOLUTION: A transistor includes: a channel region including linkers formed on a substrate and metallic nanoparticles grown from metal ions bonded to the linkers; a source region disposed at one end of the channel region; a drain region disposed at the other end of the channel region and facing the source region; and a gate coupled to the channel region to control migration of charges in the channel region. The metallic nanoparticles have a uniform pattern arrangement in the channel region.