| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of detecting pressure fluctuation in a low-frequency band, and capable of detecting fine change of pressure even right after abrupt pressure fluctuation occurs.SOLUTION: A pressure sensor 1 detecting pressure fluctuation adjusts pressure in a cavity 10 by circulating inside and outside air of the cavity 10, and has a pressure adjustment mechanism 8 including a communication opening 11b, a switch 6 and an opening/closing controller 7. |
