| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal flowmeter with high measurement accuracy.SOLUTION: A thermal flowmeter includes a flow rate detection part, a sub passage in which the flow rate detection part is arranged, and an LSI inputting a signal obtained from the flow rate detection part and outputting the signal to the outside. The side surface of the sub passage is arranged between the flow rate detection part and the LSI or on the LSI, and the longitudinal direction of a diffusion resistance provided inside the LSI is parallel with a <100> shaft of a Si single crystal. |
