METHOD FOR MANUFACTURING SUBSTRATE FOR ELECTRO-OPTIC DEVICE, SUBSTRATE FOR ELECTRO-OPTIC DEVICE, ELECTRO-OPTIC DEVICE, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To form a groove having a suitable shape for a prism as a light reflection part with high accuracy.SOLUTION: A method for manufacturing a substrate 5 for an electro-optic device relating to an applicable example includes steps of: forming a first mask 81 on a surface 6a of a substrate body 6 (step S1); forming an opening 86 in the first mask 81 so as to expose the surface 6a of the substrate body 6 (step S2); forming a second mask 82 which comprises a material having a slower etching speed than that of the first mask 81 and which covers the first mask 81 and the opening 86 (step S3); subjecting the second mask 82 and the substrate body 6 to anisotropic etching so as to form a groove 71 in the opening 86 while a wall surface 85 of the first mask 81 is covered with a member of the second mask 82 (step S4, step S5); and removing the first mask 81 and the second mask 82 (step S6).