| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro actuator that can relax stress remaining in a film such as a vibration plate having a film formed on a surface of a wafer, with a comparatively simple structure, a liquid discharge head and a manufacturing method for the same.SOLUTION: In the micro actuator comprising a vibration plate 21 having a film formed on a surface of a wafer 13b and driving means for deforming the vibration plate 21, the vibration plate 21 is provided with a slit 26. When the vibration plate 21 has a laminate structure, the slit 26 may be provided in at least a film of the uppermost layer of the plate. Further a slit 26 for separating stress remaining during formation of the film may be provided in at least either one of an interlayer dielectric film and a passivation protective film formed on the surface of the vibration plate 21. Alternately, the slit 26 may be provided in a dicing line area 25 for dicing the vibration plate 21. |
