FLEXURE HINGE-BASED MONOLITHIC PIEZO-DRIVEN STAGE AND THE METHOD OF MANUFACTURING

摘要

The present invention relates to an elastic hinge-based monolithic piezo-driven stage and a method for manufacturing the same. More specifically, two displacement expanding mechanisms are crossed to form a solid structure, a square block is processed to have a hole from the upper panel to the lower panel thereof in z-direction, and next, an elastic hinge is processed by a milling and wire cutting process so that a monolithic solid elastic hinge mechanism is realized without assembly.